| 摘要 |
PROBLEM TO BE SOLVED: To provide a straightness measuring method for easily calculating a surface profile of a measuring object. SOLUTION: Of the three displacement meters arranged in a first direction and the measuring object, one side (movable matter) is moved relative to the other side (fixed matter) in a first direction to measure distances from the three displacement meters to three measuring points which stand in line along a measuring object line extending in the first direction on the surface of the measuring object, respectively. A plurality of candidates for a solution prescribed by two profiles are determined from among a surface profile paralleling the object line, the profile of a copy curve which is an excursion of a reference point fixed to the movable matter, and the profile of pitching components accompanying the movement of the movable matter. From among the surface profile, the profile of the copy curve, and the profile of the pitching components, candidates for the solution of the highest adaptability are extracted by applying a genetic algorithm to the plurality of candidates for the solution with the value of an evaluation function used as the adaptability, with the evaluation function defined based on a profile not prescribed as a candidate for the solution. COPYRIGHT: (C)2010,JPO&INPIT
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