| 摘要 |
PROBLEM TO BE SOLVED: To provide a droplet jetting head which is obtained by bonding a flow passage forming substrate and a pressure chamber forming substrate and which suppresses alteration of a liquid caused by adhesive extrusion, deterioration of jetting performance, and the like while maintaining sufficient bonding strength between both the substrates, and to provide a simple method of manufacturing a droplet jetting head and a droplet jetting apparatus equipped with the droplet jetting head. SOLUTION: The droplet jetting head is obtained by bonding the flow passage forming substrate 22 in which a through hole 20 is formed, and a pressure chamber forming substrate 18 having a pressure chamber 12 together with an adhesive 24, wherein an end of a surface of the through hole 20 in the flow passage forming substrate 22 that contacts the adhesive 24 has a round shape having a curvature radius of from 1 to 100μm. The round shape of the end of the through hole can be easily formed by a manufacturing method comprising a curing process in which a pattern shaped mask is heated to form a curvature radius in the end of the pattern shaped mask, and a through hole forming process in which, after the formation of the through hole by dry etching, the end of the formed through hole is further subjected to dry etching with a low selectivity. COPYRIGHT: (C)2010,JPO&INPIT
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