| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a master disk which is more easily manufactured than before and achieves batch transfer simpler than the magnetic transfer. Ž<P>SOLUTION: A material 200' which reflects or shield a laser beam is deposited on a laser beam transmitting substrate 100 (Fig.3(a)). A resist film 700 is formed by performing pretreatment for forming a close contact layer and applying an electron beam resist liquid thereto by spin coating or the like. Subsequently, a desired rugged pattern is formed on the resist film 700 with exposure by irradiating the substrate 100 with an electron beam modified in accordance with information such as a servo signal. Subsequently, a structure shown in Fig.3(b) is obtained by performing development processing. Next, a protrusion 200 arranged on the desired pattern is formed (Fig.3(c)) by machining the material 200' using the pattern of the resist film 700 as a mask. Finally, the resist film 700 is removed by using an oxygen plasma or a resist peeling liquid, etc. (Fig.3(d)). Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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