| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method having a plurality of grooves capable of improving performance and excelling in productivity of a quartz oscillator, and to provide a manufacturing method excelling in productivity of a compact quartz oscillator. <P>SOLUTION: The method of manufacturing a quartz oscillator including an oscillation piece having a base, an oscillation leg and the plurality of grooves formed in parallel with one another on the oscillation leg, and electrodes formed on the oscillation piece includes the steps of: forming an electrode film on the oscillation piece and forming a resist layer formed of a photosensitive soluble material on the electrode film by an electrodeposition method; and exposing the resist layer with an exposure mask having an electrode pattern narrower than the distance from an outer sidewall of one-side groove of two grooves located on the outermost side within the plurality of grooves formed in parallel with one another on the oscillation leg to an outer sidewall of the other-side groove thereof, and wider than the distance from an inner sidewall of the one-side groove to the inner sidewall of the other-side groove. <P>COPYRIGHT: (C)2010,JPO&INPIT |
