| 摘要 |
PROBLEM TO BE SOLVED: To easily understand relative positional relation between designation of a profile line and designation of an interested area. SOLUTION: An arithmetic operation part 103 acquires designation of a display range of a profile in a profile image showing a profile of a sample, which is performed to display of a plane image of the sample in an image display area 108. A profile image plotting part 105 displays the profile image within the display range in a profile display area 109. The arithmetic operation part 103 acquires the designation of the interested area, which is performed to the display of the plane image in the image display area 108, and discriminates a range corresponding to the interested area on the display of the profile image by the profile plotting part 105. The profile plotting part 105 displays an image within the interested area and an image out of the interested range in the profile image by the profile display area 109 in different forms. COPYRIGHT: (C)2010,JPO&INPIT
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