发明名称 |
Gas Gauge, Lithographic Apparatus and Device Manufacturing Method |
摘要 |
A gas gauge has a gas delivery tube arranged to determine a distance to an object. The gas delivery tube includes a gas conduit through which a suitable measurement gas is supplied. The measurement gas leaves the gas delivery tube under pressure via an outlet and impinges on the object in an interaction area, wherein a pressure of a recoiled gas is measured by a pressure detector. A gas having a low atomic number may be used. The pressure sensor may include a membrane positioned in the gas delivery tube at least partially enveloping the gas conduit at or near the gas outlet. The pressure sensor may include a membrane disk arranged about the gas conduit. The pressure sensor may include a suitable plurality of pressure elements arranged in a substantially common plane and which may be spaced apart yet enveloping the gas conduit.
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申请公布号 |
US2010116029(A1) |
申请公布日期 |
2010.05.13 |
申请号 |
US20090609835 |
申请日期 |
2009.10.30 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
LABETSKI DZMITRY;VAN DE VIJVER YURI JOHANNES GABRIEL |
分类号 |
G01B13/12;G03B27/52 |
主分类号 |
G01B13/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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