METHOD FOR CONTROLLING CHEMICAL AUTOMATICALLY OF SUBSTRATE TREATMENT APARATUS

摘要

PURPOSE: A method for controlling a liquid medicine automatically of a substrate treatment apparatus is provided to reduce costs for an additional substrate processing apparatus for processing various processes conditions. CONSTITUTION: One is selected from a plurality of lots which are processed under different processing conditions(S150). A current processing condition of the lot is compared with the processing condition of the selected lot(S156). If the current processing condition and the processing condition of the selected are different, the characteristics of the liquid medicine is transferred to the processing condition of the selected lot(S158). The liquid medicine is controlled to be transferred to the chamber in which the selected lot is processed(s160).