| 摘要 |
PURPOSE: A radioactive ray-sensitive resin composition, an inter-layer insulating film, a micro lens using thereof, and formation methods thereof are provided to improve the sensitivity of the composition to a radioactive ray, and to form an improved pattern form ever when exceeding an optimum development time during a development process. CONSTITUTION: A radioactive ray-sensitive resin composition contains an alkali-soluble resin, a 1,2-quinonediazide compound, and a compound including a structure originated from trimethylolpropane, pentaerythritol or isocyanurate while containing more than one ethylenical unsaturated bond. The formation method of an inter-layer insulating film comprises the following steps: forming a film of the radiation-sensitive resin composition on a substrate; partially irradiating radioactive rays on the film; developing the film irradiated with the radioactive ray; and heating the developed film. |
