| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To have a permeability of 90% or more and further, restrain fluctuation of a resistance value. <P>SOLUTION: A transparent conductive film 82 is laminated and formed on a surface 83 of a substrate 81. The transparent conductive film 82 formed on the surface 83 of the substrate 81 is made of an ITOC (indium Tin Oxide Carbon) film. For forming the ITOC film on the substrate 81, an MPD (Multi Plasma Deposition) device being as a deposition device 1 using a plasma generation device is used. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
