| 摘要 |
<p>Imprint lithography benefits from precise alignment between a template and a substrate during imprinting. A moir signal resulting from indicia on the template and the substrate are acquired by a system comprising a line-scan camera and a digital micromirror device (DMD) which provides a high bandwidth, low-latency signal. Once acquired, the moir signal may be used directly to align the template and the substrate without need for discrete position/angle encoders.</p> |
