| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic motor having stacked single-plate piezoelectric vibrators configured at a side ratio different from a conventional one. <P>SOLUTION: Rectangular single-plate piezoelectric vibrators are laminated to configure a multilayer piezoelectric vibrator 50. The multilayer piezoelectric vibrator vibrates in a multiple vibration mode obtained by combining a primary vertical vibration mode and a secondary flexural vibration mode to generate a driving force. In the ultrasonic motor, the single-plate piezoelectric vibrators are formed so that the value of d/L is substantially 0.63, where L is a length of an expansion/retraction direction when the single-plate piezoelectric vibrators vibrate in the primary vertical vibration mode, and d is a length of a shear direction when the single-plate piezoelectric vibrators vibrate in the secondary flexural vibration mode. The single-plate piezoelectric vibrators are laminated in the shear direction. <P>COPYRIGHT: (C)2010,JPO&INPIT |
