| 摘要 |
This invention relates to a method for measuring a feature of an object that comprises obtaining a representation of at least the feature on the object by acquiring multiple data points via surface measurement of at least the feature. A model substantially replicating at least the feature of the object is fitted to the representation. The model comprises parameters defining at least two independently alterable portions that are linked at a common point. The fitting comprises changing the form of the model by altering at least one of the at least two independently alterable portions. The method also comprises obtaining information regarding at least the feature from the fitted model. |
