发明名称 PROCESSING APPARATUS USING ULTRASHORT PULSE LASER
摘要 The present invention relates to an ultrashort pulse laser processing device. The ultrashort pulse laser includes a stage a transfer member, a front confocal microscope, a front laser generating unit, and a front highpowered lens. A sample is provided on the stage to be processed, the transfer member transfers the stage, and the front confocal microscope is provided above the stage. The front laser generating unit is provided between the front confocal microscope and the stage to generate an ultrashort pulse laser, and the front high-powered lens focuses the laser provided from the front laser generating unit.
申请公布号 US2010108649(A1) 申请公布日期 2010.05.06
申请号 US20070532187 申请日期 2007.12.27
申请人 KOREA INSTITUTE OF MACHINERY & MJATERIALS 发明人 CHANG WON-SEOK;KIM JAE-GU;CHO SUNG-HAK
分类号 B23K26/00 主分类号 B23K26/00
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