发明名称 METHOD OF MANUFACTURING POLISHED ARTICLE HOLDING MATERIAL AND POLISHING ARTICLE
摘要 <P>PROBLEM TO BE SOLVED: To provide a polished article holding material suppressing generation of a scratch of a polished article, having a long service life with excellent workability. <P>SOLUTION: There is provided a method for manufacturing: the polished article holding material formed by heating and pressurizing combined long glass fiber and long polyalylate fiber impregnated with a heatsetting resin with the volumetric ratio of the long glass fiber to the volume of the total fiber constituting the polished article holding material being 40% or more; and a polishing article using the polished article holding material. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010099767(A) 申请公布日期 2010.05.06
申请号 JP20080272232 申请日期 2008.10.22
申请人 KYOCERA CHEMICAL CORP 发明人 MAEKAWA SATOSHI;KAZAMA SHINICHI;FUKUKAWA HIROSHI
分类号 B24B37/08;B24B37/27;B24B37/28;H01L21/304 主分类号 B24B37/08
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