发明名称 |
METHOD OF MANUFACTURING POLISHED ARTICLE HOLDING MATERIAL AND POLISHING ARTICLE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polished article holding material suppressing generation of a scratch of a polished article, having a long service life with excellent workability. <P>SOLUTION: There is provided a method for manufacturing: the polished article holding material formed by heating and pressurizing combined long glass fiber and long polyalylate fiber impregnated with a heatsetting resin with the volumetric ratio of the long glass fiber to the volume of the total fiber constituting the polished article holding material being 40% or more; and a polishing article using the polished article holding material. <P>COPYRIGHT: (C)2010,JPO&INPIT |
申请公布号 |
JP2010099767(A) |
申请公布日期 |
2010.05.06 |
申请号 |
JP20080272232 |
申请日期 |
2008.10.22 |
申请人 |
KYOCERA CHEMICAL CORP |
发明人 |
MAEKAWA SATOSHI;KAZAMA SHINICHI;FUKUKAWA HIROSHI |
分类号 |
B24B37/08;B24B37/27;B24B37/28;H01L21/304 |
主分类号 |
B24B37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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