| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an active vibration-removing unit with a compact structure, capable of performing active vibration-removing to horizontal vibration of a vibration removing stand with good response, and receiving little negative influence of vertical movement of the vibration removing stand. Ž<P>SOLUTION: The minute displacement actuator mechanism 10 removes minute horizontal displacement in the vibration removing stand 2 based on detection information by a minute displacement sensor 8. In the actuator mechanism, a horizontal diaphragm actuator 20 composed of a diaphragm 28 mounted with a permanent magnet 44 is arranged on a support plate 22 standing on a floor 4, and a first minute displacement actuator 12, composed of an iron block 16 magnetically attachable with the permanent magnet 44 and installed on the vibration removing stand 2 side, is provided for removing the minute horizontal displacement. Further, the permanent magnet 44 and the iron block 16 compose the active vibration-removing unit to be magnetically attachable via first sliding plate 46 which allows the mutual vertical sliding between them. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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