| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator in which a drive zone for making electrostatic force act thereon is wide, and driving force is large, and a transparent zone to transmit a visible light is wide in a fixed sheet. SOLUTION: In the electrostatic actuator, a mobile sheet consists of an insulating sheet, and its face is arranged movably facing the fixed sheet face, and for the fixed sheet, a plurality of electrode wires are arranged to be parallel with one another in a direction along its opposite side, and each electrode wire is formed by superposing a wide electrode wire consisting of a transparent conductive material, and a narrow electrode wire consisting of a material having higher conductivity than the wide electrode wire. COPYRIGHT: (C)2010,JPO&INPIT |
