发明名称 Method of Manufacturing a Trench Transistor Having a Heavy Body Region
摘要 A trenched field effect transistor is provided that includes (a) a semiconductor substrate, (b) a trench extending a predetermined depth into the semiconductor substrate, (c) a pair of doped source junctions, positioned on opposite sides of the trench, (d) a doped heavy body positioned adjacent each source junction on the opposite side of the source junction from the trench, the deepest portion of the heavy body extending less deeply into said semiconductor substrate than the predetermined depth of the trench, and (e) a doped well surrounding the heavy body beneath the heavy body.
申请公布号 US2010112767(A1) 申请公布日期 2010.05.06
申请号 US20100685592 申请日期 2010.01.11
申请人 MO BRIAN SZE-KI;CHAU DUC;SAPP STEVEN;BENCUYA IZAK;PROBST DEAN EDWARD 发明人 MO BRIAN SZE-KI;CHAU DUC;SAPP STEVEN;BENCUYA IZAK;PROBST DEAN EDWARD
分类号 H01L21/8234;H01L21/336;H01L29/06;H01L29/10;H01L29/78 主分类号 H01L21/8234
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