| 摘要 |
<p>PURPOSE: A return shaft system for the annealing prevention prevents to be released among the operation of the return shaft of the carrier roller. The reliability of the substrate transfer is enhanced. CONSTITUTION: A return roller part(200) is fixed to the return shaft(100). A carrier roller(210) contacting the return roller part is substrate, and the first connecting part(220) and the second. A connecting part(230) is included. The first connecting part is attached to the side of the carrier roller. The second connecting part adheres closely to the bond with the first connecting part with the return shaft.</p> |
