发明名称 |
Method and apparatus for supplying substrates to a processing tool |
摘要 |
In one aspect, a substrate loading station for a processing tool includes plural load ports. Each load port is operatively coupled to the processing tool and has a mechanism for opening a substrate carrier. A carrier handler transports substrate carriers from a factory exchange location to the load ports without placing the carriers on any carrier support location other than the load ports. Numerous other aspects are provided.
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申请公布号 |
US2004081546(A1) |
申请公布日期 |
2004.04.29 |
申请号 |
US20030650479 |
申请日期 |
2003.08.28 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
ELLIOTT MARTIN R.;RICE MICHAEL R.;LOWRANCE ROBERT B.;HUDGENS JEFFREY C.;ENGLHARDT ERIC A. |
分类号 |
B65H1/00;H01L21/677;(IPC1-7):B65H1/00 |
主分类号 |
B65H1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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