发明名称 APPARATUS AND METHOD FOR FORMING SOLDER BUMP
摘要 An apparatus and a method for forming a solder bump are provided to accurately transcribe a solder on a substrate by applying radio frequency oscillation to the solder and transcribing the solder to a underlying bumping metal in the substrate. Molten solder(140) is implanted onto a template(120) and the solder is solidified. The template and a substrate(110) are aligned to each other. Radio frequency waves are applied to the solder on the template and thus the solder is molten. The molten solder is transcribed onto the substrate and thus a solder bump is formed on the substrate.
申请公布号 KR100955603(B1) 申请公布日期 2010.05.03
申请号 KR20070135768 申请日期 2007.12.21
申请人 发明人
分类号 H01L21/60;H01L23/48 主分类号 H01L21/60
代理机构 代理人
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