| 摘要 |
PROBLEM TO BE SOLVED: To provide an inclination sensor facilitating production steps and allowing miniaturization and cost reduction. SOLUTION: The inclination sensor 10 comprises a substrate 11, a first drive electrode 21 and a second drive electrode provided on the substrate 11, a common electrode 20 provided on the substrate 11 to enclose the first and second drive electrodes except for near drawing parts of the first and second drive electrodes, a cap 13 provided on the side of the substrate 11 where the electrodes are formed, and a detection liquid 14 encapsulated into a space provided between the substrate 11 and the cap 13. COPYRIGHT: (C)2010,JPO&INPIT |
