| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an inkjet head capable of manufacturing an inkjet head having a nozzle of which the ejection performance is improved by suppressing the resistance of a fluid channel. Ž<P>SOLUTION: This manufacturing method of an inkjet head includes a process of processing a first plate on which a fluid inlet is formed, a process of processing a second plate on which a chamber and a fluid inlet are formed, a process of bonding the first plate to the top face of the second plate, a process of processing a third plate on which a restrictor and a reservoir are formed, a process of processing a fourth plate by radiating a femtosecond laser beam so as to form the nozzle, a process of bonding the fourth plate to the lower face of the third plate, and a process of bonding the third plate to the lower face of the second plate. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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