| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the deviations of a fluid delivered to a plurality of delivered regions and to reduce the uneven thickness of a film coated within the regions. <P>SOLUTION: The method for delivering a fluid includes a step of delivering the fluid to the delivered regions 103 from nozzles 52 while relatively moving a droplet delivery head 50 having a nozzle row 52a consisting of a plurality of the nozzles 52 and a substrate B provided with a plurality of substantially rectangular delivered regions 103 in the main scanning direction that substantially orthogonally intersects with a disposition direction of the droplet delivery head 50, wherein the delivered region 103 whose disposition directions are substantially orthogonal to each other, and includes of first delivered regions 103r', 103g', and 103b' and second delivered regions 103r, 103g, and 103b where areas are different, and the longitudinal directions of the first delivered regions 103r', 103g', and 103b' whose areas are larger are disposed so as to be along the main scanning direction in the step of delivering the fluid. <P>COPYRIGHT: (C)2010,JPO&INPIT |
