| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an vibration gyroscope element by which an electric charge is not generated in a detection electrode by the vibration in a driving mode alone, and to provide an inexpensive vibration gyroscope having a high SN ratio and capable of detecting a biaxial angular velocity. Ž<P>SOLUTION: The vibration gyroscope element functioning as an excitation unit and a detection unit is used, in which each of mass adding parts 4a, 4b, 4c, 4d formed plane-wise are supported by first beams 3a, 3b, 3c, 3d formed in the same plane, and the connection part of the neighboring first beam 3a, 3d is supported by the one end of a second beam 3e and the connection part of the other neighboring first beam 3b, 3c is supported by the one end of the other second beam 3f, and a vibrator 1, in which the other ends of the second beam 3e, 3f are connected to the connecting ends facing the orthogonal connecting ends of the ring shaped fourth beam 3g, is supported by the outer circumference frame 2 via the third beam 3h, 3i, each of which is connected to the other facing connecting ends of the 4th beam. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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