发明名称 |
METHOD FOR MEASURING EXPANSION/CONTRACTION, METHOD FOR PROCESSING SUBSTRATE, METHOD FOR PRODUCING DEVICE, APPARATUS FOR MEASURING EXPANSION/CONTRACTION, AND APPARATUS FOR PROCESSING SUBSTRATE |
摘要 |
<p>An expansion/contraction measuring apparatus includes a transport section which transports a flexible substrate along a surface of the substrate; a detecting section detecting first and second marks which are formed on the substrate while being separated from each other by a predetermined spacing distance in a transport direction of the substrate and which are moved, in accordance with the transport of the substrate, to first and second detection areas disposed on a transport route for the substrate respectively; a substrate length setting section which sets a length of the substrate along the transport route between the first and second detection areas to a reference length; and a deriving section which derives information about expansion/contraction of the substrate in relation to the transport direction based on a detection result of the first and second marks. Accordingly, the expansion/contraction state of an expandable/contractible substrate is measured highly accurately.</p> |
申请公布号 |
WO2010047203(A1) |
申请公布日期 |
2010.04.29 |
申请号 |
WO2009JP66465 |
申请日期 |
2009.09.14 |
申请人 |
NIKON CORPORATION;KIUCHI, TOHRU;MIZUTANI, HIDEO |
发明人 |
KIUCHI, TOHRU;MIZUTANI, HIDEO |
分类号 |
B41J3/407;B41J11/00;B41J11/42 |
主分类号 |
B41J3/407 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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