SEMICONDUCTOR TEST SYSTEM AND RELAY DRIVING TEST METHOD THEREFOR

摘要

Provided are a semiconductor test system and a relay driving test method therefor, which makes it possible to automatically and continuously perform a test, without contacting a needle tip, for a plurality of relays mounted in a probe card. A semiconductor test system comprises a probe card and a tester, wherein the probe card comprises a substrate on which are provided a probe, a relay connected to the probe, a relay controller for the relay, and a first measurement channel for connecting the relay and the probe to the tester. The tester comprises a DC power source, a control board for controlling the relay controller, and a first measurement circuit connected to the first measurement channel, the DC power source, and a voltmeter. The first measurement circuit comprises a first resistor with a predetermined time constant and a first switch connected to the measurement channel. The DC power source and the first resistor are connected to the first switch. The first measurement channel is selectively connected to the DC power source or the first resistor by means of the first switch.