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发明名称
Vorrichtung und Verfahren zur Verbesserung der Behandlungsgleichmäßigkeit in einem Plasmaprozess
摘要
申请公布号
DE112008001482(T5)
申请公布日期
2010.04.29
申请号
DE200811001482T
申请日期
2008.05.23
申请人
NORDSON CORP.
发明人
ZHAO, JIANGANG;GETTY, JAMES D.
分类号
H01J37/32;C23C16/458
主分类号
H01J37/32
代理机构
代理人
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