发明名称 CAPACITANCE MANOMETERS AND METHODS RELATING TO AUTO-DRIFT CORRECTION
摘要 <p>Systems, methods, and apparatus, including software implementation, are disclosed providing drift prediction of output values for manometers. A signal or other indication may be provided for or in relation to a capacitance manometer when a servicing, replacing, and/or zeroing event is predicted or determined to be required, based on a history (e.g., timestamps) associated with previous zeroing events. Previously recorded timestamps can be curve fit with suitable functions to calculate or predict future maintenance, calibration, and/or replacement events for a manometer. Such signals or indications can be generated as an on-screen indication, and could also be available upon interrogation of the manometer via a digital communications link or system.</p>
申请公布号 WO2008130867(A8) 申请公布日期 2010.04.29
申请号 WO2008US59986 申请日期 2008.04.11
申请人 MKS INSTRUMENTS, INC.;SULLIVAN, PHILIP;ALCAIDE, DAVID 发明人 SULLIVAN, PHILIP;ALCAIDE, DAVID
分类号 G01L9/12;G01L27/00 主分类号 G01L9/12
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