| 摘要 |
PURPOSE: A tray for wafer shipping box cleaner and methods for drying the box using a tray are provided to dry a lid of FIMS FOS(front-opening interface mechanical standard front opening shipping box) completely without a clean solution. CONSTITUTION: A tray for a box cleaning apparatus comprises a body fixing part and a lid fixing unit(50). A body fixing unit installs a body of a box. A lid fixing unit is installed to make the lid of the box rotatable. The lid fixing unit comprises gripping member(81, 82) and a rotating unit. The finger grasp member grips the lid. A rotating unit rotates the finger grasp member.
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