POLISHING DEVICE, AND METHOD FOR POLISHING A WORKPIECE SURFACE

摘要

Disclosed is a polishing device (1) comprising a tool holder (3) on which a polishing tool is disposed and which cooperates with a workpiece holder (5). The workpiece holder (5) and the tool holder (3) can be moved relative to one another in a first direction and a second direction that differs from the first direction. In order to be able to at least partially reproduce and document a polishing process, the tool holder (3) is designed to be resilient in a third direction (20) that extends perpendicular to the first direction (9) and to the second direction (10, 12).