发明名称 Laminating apparatus
摘要 A laminating apparatus heating an object to be laminated and pressing the object to be laminated in a sandwiched state includes: a first space whose internal pressure is adjustable; a second space which is separated from the first space by a diaphragm and whose internal pressure is adjustable; a heater panel provided inside the second space; one hole or more provided inside the heater panel; and one heater or more inserted in the hole. The hole is hermetically sealed and the total length of the one heater or more is shorter than a length of the hole.
申请公布号 EP1890339(B1) 申请公布日期 2010.04.28
申请号 EP20070016285 申请日期 2007.08.20
申请人 NPC INCORPORATED 发明人 CHIKAKI, YOSHIRO
分类号 H01L31/18;B32B37/10 主分类号 H01L31/18
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