A SPUTTERING METHOD AND APPARATUS AND A SPUTTERING TARGET SUPPORT FRAME ASSEMBLY,申请号KR20070073724-传众专利搜索

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发明名称	A SPUTTERING METHOD AND APPARATUS AND A SPUTTERING TARGET SUPPORT FRAME ASSEMBLY
摘要
申请公布号	KR100954248(B1)	申请公布日期	2010.04.23
申请号	KR20070073724	申请日期	2007.07.23
申请人		发明人
分类号	C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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