发明名称 METHOD AND SYSTEM FOR DETECTING DEFECTS
摘要 Method for detecting defects, the method comprising the procedures of identifying theoretically-symmetrical windows in an object-image; analyzing the theoretically-symmetrical windows according to expected symmetry of the theoretically-symmetrical windows; and determining the presence of defects according to a deviation from the expected symmetry.
申请公布号 KR100954703(B1) 申请公布日期 2010.04.23
申请号 KR20047012231 申请日期 2003.02.04
申请人 发明人
分类号 G06T7/00;G03F1/84;G06F19/00;G06T7/60;H01L21/66 主分类号 G06T7/00
代理机构 代理人
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