METHOD AND DEVICE FOR ANALYZING SPECIMEN

摘要

PROBLEM TO BE SOLVED: To heighten the sensitivity and accuracy of analysis using a time-of-flight mass spectrometer. SOLUTION: Cluster particles are used as primary incoming particles to generate a plurality of secondary particles per primary incoming particle pulse, and the secondary particles are analyzed by using the time-of-flight mass spectrometer 18. By means of a digital oscilloscope 25, detection signals on the secondary particles are counted with an equal probability independently of flight times of the secondary particles, with a pulsing signal for pulsing the incoming particle used as a base time signal. COPYRIGHT: (C)2010,JPO&INPIT