发明名称 |
METHOD AND APPARATUS FOR PRECISION SURFACE MODIFICATION IN NANO-IMPRINT LITHOGRAPHY |
摘要 |
A scalable, high-throughput nanoimprint lithography priming tool includes a dual-reactant chemical vapor deposition reactor chamber, a mandrel configured to hold a plurality of hard disks at an inner diameter of the hard disks, and a transport mechanism to move the plurality of hard disks into and out of the chamber. The tool may also include a transfer tool to transfer the plurality of hard disks to additional chambers for processing. |
申请公布号 |
US2010098862(A1) |
申请公布日期 |
2010.04.22 |
申请号 |
US20090572224 |
申请日期 |
2009.10.01 |
申请人 |
INTEVAC, INC. |
发明人 |
XU REN;PETERSEN, III CARL T.;LIU CHARLES |
分类号 |
H01L21/677;B05D1/36;B05D3/00;C23C16/00 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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