MOVING BODY APPARATUS, EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, ASSEMBLING METHOD AND MAINTAINING METHOD FOR MOVING BODY APPARATUS, AND ADJUSTING METHOD, MAINTAINING METHOD, AND ASSEMBLING METHOD FOR EXPOSURE APPARATUS

摘要

A fine movement stage (21) is rockably supported on a dead weight cancelling apparatus (27) by a leveling apparatus (76).  Rocking of the fine movement stage (21) is mechanically limited by a leveling lock apparatus (60) for pressing a roller provided to a leveling cup of the leveling apparatus (76), where the pressing of the roller is performed through a polyhedron member and an air cylinder by means of a pressing section provided to the fine movement stage (21).  Rocking of the fine movement stage (21) is mechanically limited also by a jack stopper apparatus (100) bridged between the fine movement stage (21) and a Y coarse movement stage (23Y).  Accordingly, the attitude of the rockably supported fine movement stage can be stabilized when a moving body apparatus is not being operated.