发明名称 LASER DEVICE, PHOTOTHERAPY DEVICE, EXPOSURE DEVICE, DEVICE MANUFACTURING METHOD, AND INSPECTION APPARATUS FOR INSPECTING OBJECT TO BE INSPECTED
摘要 PROBLEM TO BE SOLVED: To widen a variable wavelength range of output light of a laser device. SOLUTION: In the laser device, a fundamental wavelength light generation unit generates light having a fundamental wavelength corresponding to an output wavelength command signal commanding the wavelength of the output light of the laser device 1. An optical amplification unit 20 amplifies the light having the fundamental wavelength. A wavelength conversion unit 30 has nonlinear optical crystals 31, 32, 34, 37, 39, and 40 which each perform wavelength conversion, and temperature regulators 11a, 31a, 32a, 34a, 37a, 39a, and 40a that regulate them respectively, and converts the light amplified by the optical amplification unit 20 into light having the wavelength that the output wavelength command signal indicates. A storage unit 60 stores correspondence information showing correspondence relation between the wavelength that the output wavelength command signal indicates and temperatures of the respective nonlinear optical crystals which should be set corresponding to the wavelength. A control unit controls each temperature regulator so that the temperature of the nonlinear optical crystal corresponding to the temperature regulator reaches the temperature which is determined by the correspondence information according to the output wavelength command signal and should be set. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010093210(A) 申请公布日期 2010.04.22
申请号 JP20080264499 申请日期 2008.10.10
申请人 NIKON CORP 发明人 TAKADA YASUTOSHI;TOKUHISA AKIRA
分类号 H01S3/06;H01S3/094 主分类号 H01S3/06
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