| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for selecting a polishing sheet for a polishing pad, so as to appropriate a wear degree and stabilize polishing performances while taking the lifetime into consideration. <P>SOLUTION: The polishing pad has a urethane sheet of a foamed structure having a polishing face. The urethane sheet is selected from sheets prepared by slicing a foamed material comprising a mixture of a polyisocyanate compound, a polyol compound, water and a polyamine compound. A sheet having an F value, which is defined by F=-36.7×HSC-758.8×R+656×D-619×T+2,587, in a range from 100 to 200 is selected as a favorable product. In the above definition, HSC represents a content rate of a hard segment, R represents an equivalent ratio of the total of hydroxy groups in the polyol compound and amino groups in the polyamine compound with respect to isocyanate groups of the polyisocyanate compound, D represents bulk density and T represents a thickness. The F value correlates with easiness of wear on the polishing face while taking the lifetime into consideration. <P>COPYRIGHT: (C)2010,JPO&INPIT |
