| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing system 1 for shortening time by simplifying control to link the operation timings of coating equipment 3 and a conveyance device 5. SOLUTION: This substrate processing system is provided with coating equipment 3 having a pin 14 vertically operating in such a state that a substrate W is placed for transferring a substrate W coated with a coating solution and a conveyance device 5 having a hand part 31 approaching and leaving the coating equipment 3 for conveying the substrate W. A signal is transmitted and received between the coating equipment 3 and the conveyance device 5 through a communication line L5. The movement of the hand part 31 is started before the completion of the operation of the pin 14 for transferring the substrate W based on the signal transmitted between the coating equipment 3 and the conveyance device 5 through the communication line L5 so that the operation of the pin 14 and the movement of the hand part 31 can be achieved in parallel. COPYRIGHT: (C)2010,JPO&INPIT |
