GAN LIGHT-EMITTING DIODE WITH MONOLITHICALLY INTEGRATED PHOTONIC CRYSTALS AND ANGLED SIDEWALL DEFLECTORS AND METHOD OF THEREOF

摘要

PURPOSE: A light emitting diode(LED) and a method for manufacturing the same are provided to obtain a blue LED structure with high light extracting efficiency by simultaneously inserting a micrometer size inclined sidewall deflector and nanometer size photonic crystals to a GaN-based LED device. CONSTITUTION: A photonic crystal is integrated on the upper side of a support substrate using a laser holography method and a dry-etching method. A GaN-based epi layer is formed on the upper side of the support substrate. An inclined reflector is formed on the sidewall of the GaN-based epi layer by an inductively coupled plasma-reactive ion etching method. The angle of the inclined reflector is in a range of 20 to 40°. A protective layer is formed on the upper side of the GaN-based epi layer by passing through a reflow.