| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe card capable of desired actual operation test of a semiconductor device by means of an existing LSI tester even if both a low-speed test signal and a high-speed test signal are necessary. Ž<P>SOLUTION: A low-speed test signal transmission control part 22 generates a predetermined low-speed test signal to be transmitted to the semiconductor device 4 based on an instruction from the LSI tester 3, and outputs the generated low-speed test signal to a first driver 23 with predetermined timing based on an output instruction from the tester 3. A high-speed test signal transmission control part 24 generates a predetermined high-speed test signal to be transmitted to the semiconductor device 4 based on an instruction from the LSI tester 3, and outputs the generated high-speed test signal to a second driver 25 in predetermined timing based on the output instruction from the LSI tester 3. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
