发明名称 PANEL UNIFYING METHOD AND A DEVICE THEREOF, ESPECIALLY REGARDING TO PERFORMING A POSITION ADJUSTMENT AT HIGH PRECISION
摘要 PURPOSE: A panel unifying method and a device thereof are provided to move a lower panel while pressurizing an upper panel when the two panels are unified, and to remove a position deflection between two sheets of the panels, which is caused by the pressurization, thereby suppressing a relative movement of the two sheets of the panels to a minimum. CONSTITUTION: While upper and lower panels are faced together, alignment marks comprised on the upper and lower panels are read by an image identification camera(S31,S32). Whether the alignment marks of the upper and lower panels are within a predetermined range is decided(S33). If not, a lower surface plate is moved(S34). If a position adjustment is completed, a fine position adjustment is performed(S35-S37). An upper surface plate is vertically moved with regards to the lower surface plate, to pressurize while two sheets of the panels are folded together(S38). The alignment marks are read after the pressurization(S39), and whether a position deflection of the two panels is within a permitted range is decided(S40). If so, whether the pressurization is a final pressurization is decided(S42). If so, an amount of a position deflection of the alignment marks is measured(S43).
申请公布号 KR20040054487(A) 申请公布日期 2004.06.25
申请号 KR20030076555 申请日期 2003.10.31
申请人 FUJITSU LIMITED 发明人 TAKENAKA NOBUROU;HATANO NORIHIKO;UMEMURA HIROFUMI;TANAKA NOBUYOSHI
分类号 G01B11/04;G01D5/12;G02F1/13;G02F1/1339;G05D15/00;(IPC1-7):G02F1/13 主分类号 G01B11/04
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