| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveying facility preventing contact of an ejection object substrate to an air jetting body for floating. SOLUTION: The substrate conveying facility is provided with the air jetting body 71 for floating disposed in a portion next to a downstream side end of a substrate ejection direction in a support plate to jet out air between a bottom face of the ejection object substrate 1 and a top face of the support plate 45 for mounting and supporting the substrate 1, and an auxiliary air jetting body 71 jetting out air between a top face of the air jetting body 71 for floating and the bottom face of the ejection object substrate 1 ejected by an ejection means. COPYRIGHT: (C)2010,JPO&INPIT
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