Luminescence scanner for spatially resolved determination of physical characteristics of semiconductor component, has analyzing unit determining physical properties of semiconductor component from detected spatially resolved luminescence

摘要

The scanner (1) has a single-line lighting unit for excitation of luminescence in a semiconductor device. A detector (4) i.e. indium gallium arsenide charge coupled device (CCD) camera, is provided for spatially resolved detection of luminescence emitted by a semiconductor component. An analyzing unit i.e. electronic computing unit, determines physical properties of the semiconductor component from the detected spatially resolved luminescence. A lighting unit (3a) illuminates the semiconductor device with light. An independent claim is also included for a method for detecting physical characteristics of a semiconductor component by a luminescence scanner.