发明名称 METHOD FOR MANUFACTURING ANTENNA AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 The present invention provides an antenna with low resistance and a semiconductor device having an antenna whose communication distance is improved. A fluid containing conductive particles is applied over an object. After curing the fluid containing the conductive particles, the fluid is irradiated with a laser to form an antenna. As a method for applying the fluid containing the conductive particles, screen printing, spin coating, dipping, or a droplet discharging method is used. Further, a solid laser having a wavelength of 1 nm or more and 380 nm or less is used as the laser.
申请公布号 US2010099224(A1) 申请公布日期 2010.04.22
申请号 US20090645511 申请日期 2009.12.23
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 AOKI TOMOYUKI;YAMADA DAIKI
分类号 H01L21/56 主分类号 H01L21/56
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