发明名称
摘要 A molding apparatus for patterning a workpiece includes a first support member for supporting the mold, a second support member arranged opposite to the first support member, and a pressing mechanism for pressing the mold and the work together using the support members to pattern the workpiece. In this structure, either the surface of the first support member for supporting the mold or the surface of the second support member for supporting the workpiece is smaller in area than both surfaces of the mold and the workpiece.
申请公布号 JP4455092(B2) 申请公布日期 2010.04.21
申请号 JP20040044726 申请日期 2004.02.20
申请人 发明人
分类号 B81C99/00;H01L21/027;B29C43/02;B29C43/32;B29C59/02;B29L17/00;G03F7/00 主分类号 B81C99/00
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