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发明名称
摘要
申请公布号	JP4452160(B2)	申请公布日期	2010.04.21
申请号	JP20040328305	申请日期	2004.11.12
申请人		发明人
分类号	H01L21/027;G02B7/02;G03B27/42;G03F7/20	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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