发明名称 COMPLEMENTARY METAL OXIDE SEMICONDUCTOR DEVICE AND FABRICATION METHOD THE SAME
摘要 PURPOSE: A complementary metal oxide semiconductor device and a method for manufacturing the same are provided to prevent the generation of latch-up by etching a substrate and subsequently embedding a conductive layer in the etched region. CONSTITUTION: A first conductive well(220) includes a first transistor and a first trench(T1). The first voltage is applied to the first transistor. The depth of the first trench is deeper than the source and the drain of the first transistor. A second conductive well(230) is formed in the first conductive well. The second conductive well includes a second transistor and a second trench(T2). A second voltage is applied to the second transistor. A first guard-ring electrode(240) is embedded in the first trench. A second guard-ring electrode(250) is embedded in the second trench. The first voltage and the second voltage are respectively applied to the first guard-ring electrode and the second guard-ring electrode.
申请公布号 KR20100040470(A) 申请公布日期 2010.04.20
申请号 KR20080099586 申请日期 2008.10.10
申请人 HYNIX SEMICONDUCTOR INC. 发明人 WOO, TAKE KYUN
分类号 H01L21/8238;H01L21/336 主分类号 H01L21/8238
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