摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a seed for polycrystalline silicon precisely and rapidly cutting a silicon rod without causing a separated plate-like member to tilt or fall during cutting the silicon rod. <P>SOLUTION: A pair of end-face supporting members 4, 5 for pressing and supporting both end-faces of the silicon rod R in the axial direction and a cutting blade 14 for cutting the silicon rod R in the axial direction are provided on a table on which the silicon rod R is placed and comb-like grooves 27, 34 that allow the cutting blade 14 to pass through are formed in the end-face supporting members 4, 5. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |