| 摘要 |
PROBLEM TO BE SOLVED: To provide a control method of a conveying mechanism that hardly causes an error in initial driving of the conveying mechanism even after being stopped for a long time. SOLUTION: The control method of the conveying mechanism of a substrate processing apparatus comprising a load port, a carry-in/out chamber connected to the load port, a load lock chamber connected to the carry-in/out chamber, a conveying chamber connected to the load lock chamber, a plurality of processing chambers connected to the conveying chamber, and a conveying mechanism provided for the conveying chamber and conveying a substrate to be processed includes finely driving the conveying mechanism after the substrate to be processed reaches the load port and before the substrate to be processed is conveyed to the conveying chamber. COPYRIGHT: (C)2010,JPO&INPIT
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